Material characterizations

To ensure optimal epiwafer quality, we perform numerous routine characterizations to inspect material quality which include: X-ray diffraction, Hg-probe capacitance-voltage 2DEG profiling, contactless Rs, free carrier and mobility measurement and particle mapping. Other advanced techniques including Photoluminescence, Cathodoluminescence and atomic force microscopy are also available.

Characterization operations

On top of our quality assurance, we perform X-Ray diffraction, photoluminescence and cathodoluminescence spectroscopy, particle mapping, capacitance-voltage profiling, mobility and free charge carrier concentration measurement, and atomic force microscopy.